The dataset records FTIR data for different materials at high temperatures
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High temperature FTIR data
Jun 26, 2024
Zhang, Man; Wang, Xiawa; Zhou, Xiaoqi, 2024, "High temperature FTIR data", https://doi.org/10.7910/DVN/SOMHXQ, Harvard Dataverse, V1, UNF:6:S5MVd6sn/4qAFf5+xbOlEA== [fileUNF]
The statistical data in this document are all from the actual measurements of the members of the group, involving materials such as Al2O3, Ge, Nb, SiC, and a layer of TiN with a thickness of 200nm deposited on the flat silicon wafer
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